シオツキ テツオ   SHIOTSUKI Tetsuo
  汐月 哲夫
   所属   東京電機大学  未来科学部 ロボット・メカトロニクス学科
   東京電機大学大学院  未来科学研究科 ロボット・メカトロニクス学専攻
   東京電機大学大学院  先端科学技術研究科 先端技術創成専攻
   職種   教授
言語種別 英語
発行・発表の年月 2016/06
形態種別 学術研究論文
査読 査読有り
標題 A Design Method of Reference Model for near Time Optimal Model-Following Servo Controller: A Case Study for Multi-Zone Heating System with Input Saturation
執筆形態 共著
掲載誌名 International Journal of Control Science and Engineering
掲載区分国外
出版社・発行元 Scientific & Academic Publishing
巻・号・頁 6(2),pp.49-57
著者・共著者 Kazuhiro Mimura, Tetsuo Shiotsuki
概要 This paper proposes a design method of reference model for model-following servo (MFS) control which overcomes the difficulty of control input saturation. One typical application of MFS control is heating and/or cooling plate control of semiconductor wafer fabrication. The control object is inherently MIMO (Multi Input Multi Output) system with interaction and input saturation and requires both temperature uniformity and faster response. MFS control is a well-known effective technique for tracking control of MIMO system with interaction and disturbances. However input saturation obstacles the accomplishment of the control requirements In order to overcome this difficulty we introduce a new design method of reference model and input signal based on master-slave step response tests and near time optimal simulations. Experimental results indicate the effectiveness of the proposed reference model design method which realizes both faster response and better uniformity.
DOI doi:10.5923/j.control.20160602.03
ISSN 2168-4952