| 言語種別 | 英語 |
|---|---|
| 発行・発表の年月 | 2020/08 |
| 形態種別 | 学術研究著書 |
| 標題 | Measurement of Photoelastic Constant of Diamond-Like Carbon Film |
| 執筆形態 | 共著 |
| 掲載誌名 | Advanced Experimental Mechanics |
| 掲載区分 | 国内 |
| 出版社・発行元 | JSEM |
| 巻・号・頁 | 5,141-145 |
| 総ページ数 | 5 |
| 著者・共著者 | Ryosuke SAITO, Kenji GOMI and Yasushi NIITSU |
| 概要 | Diamond-like carbon (DLC) films have excellent properties such as high hardness, wear resistance and low friction coefficient. Therefore, DLC is used for surface treatment in the fields of cutting tools, molds, automobile industry, medical care, nanotechnology, etc.
In this study, DLC films were formed on a glass substrate by plasma enhanced chemical vapor deposition. Then, from the warpage of the substrate due to the residual stress of DLC, the residual stress was calculated using the Stoney equation. On the other hand, the retardation of the DLC film was measured by the photoelastic experiment. The photoelastic constant of the DLC, 5.13 × 10-11 Pa-1, was obtained from the obtained relation between the residual stress and retardation. |